MEMS Foundry CAPABILITIES
MEMS Foundry CAPABILITIES
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| CIRCUIT DESIGN | P-SPICE, MICROSIM, ORCAD |
| LAYOUT DESIGN | L-EDIT, GDS2, ACAD, ORCAD |
| PROCESS SIMULATION | SUPREME |
| MASK MANUFACTURING | 4X, 5X, 10X STEPPER |
| DIFFUSIONS/OXIDATIONS | 6 DIFFUSION TUBES |
| LPCVD | 2 REACTORS |
| PECVD | APPLIED MAT. 3300 |
| PHOTOLITHOGRAPHY | CANON, PERKIN ELMER, COBILT, 10X STEPPER |
| PLASMA ETCH | PLASMATHERM, TEGAL, LFE, PLASMALAB |
| SPUTTERING | 3XCVC 601 MAGNETRON: |
| ELECTROPLATING | GOLD |
| SCREEN PRINTING | CW PRICE, AMI PRESCO |
| DICING | 2 MICROAUTOMATION |
| WIRE BONDING | EMB, K&S, WESTBOND |
| 4PP MEASUREMENT | FLUKE, MAGNETRON INST. |
| CD MEASUREMENT | NANOMETRICS NANOLINE |
| CURVE TRACER | TEKTRONIX 577 |
| PARAM. ANALYZER | HP-4145B |
| ELECTRON MICROSCOPE | HITACHI 520S |
| X-RAY SPECT. ANALYZER | KEVEX |
| LASER TRIMMING | ISI |
| Home | Corporate Information | USA Sales Reps | International Sales Reps |
| HTELabs, 2964-2966 Scott Blvd. Santa Clara, CA 95054 |
| Tel:(408)-986-8026, Fax:(408)-850-1910 |
| http://www.mems-foundry.com |